Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato | 2016-09-06 |
| 8709170 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi | 2014-04-29 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Takayuki Toshima +5 more | 2013-02-12 |
| 8294282 | Semiconductor device and adhesive sheet | Hidekazu Hayashi, Hiroshi Tomita, Junya Sagara, Shinya Takyu, Norihiro Togasaki +1 more | 2012-10-23 |