Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12022668 | Semiconductor device and method of manufacturing the same | Masanori MIZUKOSHI | 2024-06-25 |
| 11342182 | Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method | Yasuhito Yoshimizu, Fuyuma Ito, Hakuba Kitagawa, Yohei Yamamoto, Yuji Yamada | 2022-05-24 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Tatsuhiko Koide, Shinsuke Kimura, Yoshihiro Ogawa, Hiroshi Tomita | 2020-02-25 |
| 10529588 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Yasuhito Yoshimizu, Hiroaki Yamada | 2020-01-07 |
| 10522596 | Semiconductor storage device comprising resistance change film and method of manufacturing the same | Keiichi Sawa, Kazuhisa Matsuda, Atsushi Takahashi, Takaumi Morita, Masayuki Tanaka +4 more | 2019-12-31 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hiroshi Tomita, Kazuyuki Mitsuoka, Mitsuaki Iwashita +4 more | 2019-02-05 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hiroshi Tomita, Kazuyuki Mitsuoka, Gen You +3 more | 2018-10-09 |
| 10014186 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Yasuhito Yoshimizu, Hiroaki Yamada | 2018-07-03 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hiroshi Tomita | 2018-06-05 |
| 9991159 | Semiconductor device manufacture method | Fuyuma Ito, Yasuhito Yoshimizu, Yuya Akeboshi, Masayuki Kitamura | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hiroshi Tomita | 2018-01-02 |
| 9673217 | Semiconductor device and method for manufacturing same | Atsuko Sakata, Yohei Sato, Yasuhito Yoshimizu, Satoshi Wakatsuki, Takeshi Ishizaki +8 more | 2017-06-06 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Yohei Sato, Takayuki Toshima +5 more | 2017-02-28 |
| 9570286 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hiroshi Tomita, Hidekazu Hayashi, Linan Ji | 2017-02-14 |
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Hiroshi Tomita, Yukiko Kitajima, Yohei Sato | 2016-09-06 |
| 9384980 | Manufacturing method of semiconductor device | Yasuhito Yoshimizu, Mitsuhiro Omura, Satoshi Wakatsuki, Tsubasa Imamura | 2016-07-05 |
| 9177781 | Plasma processing method and manufacturing method of semiconductor device | Shigeru Tahara, Eiichi Nishimura, Fumiko Yamashita, Hiroshi Tomita, Tokuhisa Ohiwa +1 more | 2015-11-03 |
| 9126229 | Deposit removal method | Shigeru Tahara, Eiichi Nishimura, Hiroshi Tomita, Tokuhisa Ohiwa, Mitsuhiro Omura | 2015-09-08 |
| 9065064 | Manufacturing method and manufacturing apparatus of functional element | Hiroshi Tomita, Yasuhito Yoshimizu, Yusuke Tanaka | 2015-06-23 |
| 8950082 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hiroshi Tomita, Hidekazu Hayashi, Linan Ji | 2015-02-10 |
| 8865563 | Film embedding method and semiconductor device | Yasuhito Yoshimizu, Hiroshi Tomita | 2014-10-21 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Yohei Sato, Takayuki Toshima +5 more | 2014-07-08 |
| 8772164 | Method for forming interconnection pattern and semiconductor device | Yasuhito Yoshimizu, Satoshi Wakatsuki, Atsuko Sakata, Hiroshi Tomita | 2014-07-08 |
| 8741168 | Wet etching method for silicon nitride film | Yasuhito Yoshimizu, Hiroshi Tomita | 2014-06-03 |
| 8709170 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima | 2014-04-29 |