Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921428 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Yoshihiro Ogawa, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2024-03-05 |
| 11828291 | Motor device, controller, motor system, fan unit, and communication method | Mitsuhiro Sakamoto, Yasuyuki Yokouchi | 2023-11-28 |
| 11034140 | Coating agent containing clay, resin, and organic solvent, protective film using same, and product | Takeo Ebina, Ryo Ishii, Hiromichi Hayashi, Yoshito Wakui, Emiko Tomon +3 more | 2021-06-15 |
| 10978316 | Semiconductor processing device | Satoshi NAKAOKA, Tomohiko Sugita, Hiroaki ASHIDATE, Katsuhiro Sato | 2021-04-13 |
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama +3 more | 2020-11-17 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Tatsuhiko Koide, Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita | 2020-02-25 |
| 10453729 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Hiroyasu Iimori | 2019-10-22 |
| 10290491 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Yoshihiro Ogawa | 2019-05-14 |
| 10032658 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2018-07-24 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita | 2018-01-02 |
| 9818627 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2017-11-14 |
| 9748091 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Yoshihiro Ogawa | 2017-08-29 |
| 9583331 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2017-02-28 |
| 9213242 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Yoshihiro Ogawa, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2015-12-15 |
| 8435903 | Semiconductor substrate surface treatment method | Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita | 2013-05-07 |
| 8410649 | Electric motor, electric motor unit, blower, and electric device | Yuichi Tanabe, Toshifumi Tsutsumi, Hirosi Mukaide | 2013-04-02 |
| 8399357 | Method of manufacturing semiconductor device | Yoshihiro Ogawa, Tatsuhiko Koide | 2013-03-19 |
| 8138580 | Adhesive composition for electronic components, and adhesive sheet for electronic components using the same | Yukitsuna Konishi, Hirohumi Tsuchiya, Yasushi Sawamura | 2012-03-20 |