| 11921428 |
Substrate processing method and substrate processing apparatus |
Yoshihiro Uozumi, Yoshihiro Ogawa, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more |
2024-03-05 |
| 11828291 |
Motor device, controller, motor system, fan unit, and communication method |
Mitsuhiro Sakamoto, Yasuyuki Yokouchi |
2023-11-28 |
| 11034140 |
Coating agent containing clay, resin, and organic solvent, protective film using same, and product |
Takeo Ebina, Ryo Ishii, Hiromichi Hayashi, Yoshito Wakui, Emiko Tomon +3 more |
2021-06-15 |
| 10978316 |
Semiconductor processing device |
Satoshi NAKAOKA, Tomohiko Sugita, Hiroaki ASHIDATE, Katsuhiro Sato |
2021-04-13 |
| 10840079 |
Substrate processing apparatus, substrate processing method and storage medium |
Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama +3 more |
2020-11-17 |
| 10573508 |
Surface treatment apparatus and method for semiconductor substrate |
Tatsuhiko Koide, Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita |
2020-02-25 |
| 10453729 |
Substrate treatment apparatus and substrate treatment method |
Tatsuhiko Koide, Hiroyasu Iimori |
2019-10-22 |
| 10290491 |
Substrate treatment apparatus and substrate treatment method |
Tatsuhiko Koide, Yoshihiro Ogawa |
2019-05-14 |
| 10032658 |
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus |
Yoshihiro Ogawa |
2018-07-24 |
| 9991111 |
Apparatus and method of treating surface of semiconductor substrate |
Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita |
2018-06-05 |
| 9859111 |
Apparatus and method of treating surface of semiconductor substrate |
Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita |
2018-01-02 |
| 9818627 |
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus |
Yoshihiro Ogawa |
2017-11-14 |
| 9748091 |
Substrate treatment apparatus and substrate treatment method |
Tatsuhiko Koide, Yoshihiro Ogawa |
2017-08-29 |
| 9583331 |
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus |
Yoshihiro Ogawa |
2017-02-28 |
| 9213242 |
Substrate processing method and substrate processing apparatus |
Yoshihiro Uozumi, Yoshihiro Ogawa, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more |
2015-12-15 |
| 8435903 |
Semiconductor substrate surface treatment method |
Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita |
2013-05-07 |
| 8410649 |
Electric motor, electric motor unit, blower, and electric device |
Yuichi Tanabe, Toshifumi Tsutsumi, Hirosi Mukaide |
2013-04-02 |
| 8399357 |
Method of manufacturing semiconductor device |
Yoshihiro Ogawa, Tatsuhiko Koide |
2013-03-19 |
| 8138580 |
Adhesive composition for electronic components, and adhesive sheet for electronic components using the same |
Yukitsuna Konishi, Hirohumi Tsuchiya, Yasushi Sawamura |
2012-03-20 |
