Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921428 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Yoshihiro Ogawa, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2024-03-05 |
| 11508574 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | — | 2022-11-22 |
| 10453729 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Shinsuke Kimura | 2019-10-22 |
| 10290490 | Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device | Tomohiko Sugita, Yoshihiro Ogawa | 2019-05-14 |
| 10199209 | Substrate treatment apparatus and substrate treatment method | Tomohiko Sugita, Katsuhiro Sato, Yoshihiro Ogawa | 2019-02-05 |
| 9514952 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | Takehiro Ogata, Tomohiko Sugita | 2016-12-06 |
| 9213242 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Yoshihiro Ogawa, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2015-12-15 |
| 7985683 | Method of treating a semiconductor substrate | Hiroshi Tomita, Tatsuhiko Koide, Hisashi Okuchi, Kentaro Shimayama, Linan Ji | 2011-07-26 |
| 7838425 | Method of treating surface of semiconductor substrate | Hiroshi Tomita, Hisashi Okuchi, Tatsuhiko Koide, Linan Ji | 2010-11-23 |
| 7776756 | Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device | Hisashi Okuchi, Mami Saito, Yoshihiro Ogawa, Hiroshi Tomita, Soichi Nadahara | 2010-08-17 |
| 7749909 | Method of treating a semiconductor substrate | Hiroshi Tomita, Tatsuhiko Koide, Hisashi Okuchi, Kentaro Shimayama, Linan Ji | 2010-07-06 |
| 7727871 | Manufacturing method of semiconductor device using etching solution | Hiroshi Tomita | 2010-06-01 |
| 7267742 | Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device | Hisashi Okuchi, Mami Saito, Yoshihiro Ogawa, Hiroshi Tomita, Soichi Nadahara | 2007-09-11 |
| 7097784 | Etching method and apparatus for semiconductor wafers | Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita | 2006-08-29 |