Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243751 | Chemical solution, etching method, and method for manufacturing semiconductor device | Hakuba Kitagawa, Hiroshi Fujita | 2025-03-04 |
| 11929250 | Substrate processing apparatus, substrate processing method and a semiconductor device manufacturing method | Katsuhiro Sato, Hiroshi Fujita | 2024-03-12 |
| 11921428 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Yoshihiro Ogawa, Hiroyasu Iimori, Hideaki Hirabayashi +1 more | 2024-03-05 |
| 11862484 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Yoshihiro Ogawa, Masahiro Kiyotoshi | 2024-01-02 |
| 11616120 | Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate | Fuyuma Ito, Hiroki Nakajima, Naomi Yanai, Tomohiko Sugita, Hakuba Kitagawa +1 more | 2023-03-28 |
| 10714328 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Tomonori Harada, Katsuhiro Sato | 2020-07-14 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Shinsuke Kimura, Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita | 2020-02-25 |
| 10453729 | Substrate treatment apparatus and substrate treatment method | Hiroyasu Iimori, Shinsuke Kimura | 2019-10-22 |
| 10290491 | Substrate treatment apparatus and substrate treatment method | Shinsuke Kimura, Yoshihiro Ogawa | 2019-05-14 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Shinsuke Kimura, Hisashi Okuchi, Hiroshi Tomita | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Shinsuke Kimura, Hisashi Okuchi, Hiroshi Tomita | 2018-01-02 |
| 9748091 | Substrate treatment apparatus and substrate treatment method | Shinsuke Kimura, Yoshihiro Ogawa | 2017-08-29 |
| 9213242 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Yoshihiro Ogawa, Hiroyasu Iimori, Hideaki Hirabayashi +1 more | 2015-12-15 |
| 8435903 | Semiconductor substrate surface treatment method | Yoshihiro Ogawa, Shinsuke Kimura, Hisashi Okuchi, Hiroshi Tomita | 2013-05-07 |
| 8399357 | Method of manufacturing semiconductor device | Yoshihiro Ogawa, Shinsuke Kimura | 2013-03-19 |
| 8097538 | Method of manufacturing semiconductor device | Hisashi Okuchi, Hidekazu Hayashi, Hiroshi Tomita | 2012-01-17 |
| 7985683 | Method of treating a semiconductor substrate | Hiroshi Tomita, Hisashi Okuchi, Kentaro Shimayama, Hiroyasu Iimori, Linan Ji | 2011-07-26 |
| 7838425 | Method of treating surface of semiconductor substrate | Hiroshi Tomita, Hiroyasu Iimori, Hisashi Okuchi, Linan Ji | 2010-11-23 |
| 7749909 | Method of treating a semiconductor substrate | Hiroshi Tomita, Hisashi Okuchi, Kentaro Shimayama, Hiroyasu Iimori, Linan Ji | 2010-07-06 |
| 7564075 | Semiconductor device | Shuji Fujiwara | 2009-07-21 |
| 7446009 | Manufacturing method for semiconductor device | Daichi Suma, Yoshikazu Ibara, Koichi Saito | 2008-11-04 |
| 7129530 | Semiconductor device | Koichi Saito, Yoshikazu Ibara, Daichi Suma | 2006-10-31 |
| 6974717 | Solid state image device and including an optical lens and a microlens | Makoto Izumi, Mitsuru Okigawa, Kazuhiro Sasada, Naoteru Matsubara | 2005-12-13 |