Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027380 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuhiro Sato, Hiroaki ASHIDATE | 2024-07-02 |
| 11616120 | Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate | Fuyuma Ito, Tatsuhiko Koide, Hiroki Nakajima, Naomi Yanai, Hakuba Kitagawa +1 more | 2023-03-28 |
| 11610789 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuhiro Sato, Hiroshi Fujita, Yoshinori Kitamura, Satoshi NAKAOKA | 2023-03-21 |
| 11145670 | Semiconductor storage device and manufacturing method thereof | Yasuhito Yoshimizu | 2021-10-12 |
| 10978316 | Semiconductor processing device | Satoshi NAKAOKA, Shinsuke Kimura, Hiroaki ASHIDATE, Katsuhiro Sato | 2021-04-13 |
| 10290490 | Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device | Hiroyasu Iimori, Yoshihiro Ogawa | 2019-05-14 |
| 10199209 | Substrate treatment apparatus and substrate treatment method | Katsuhiro Sato, Hiroyasu Iimori, Yoshihiro Ogawa | 2019-02-05 |
| 9514952 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | Hiroyasu Iimori, Takehiro Ogata | 2016-12-06 |