Issued Patents All Time
Showing 1–25 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198961 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Suguru Enokida | 2025-01-14 |
| 11869789 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Suguru Enokida | 2024-01-09 |
| 11781249 | Polyurethane elastic fiber, yarn package of same, and product including same | Hitoshi Sato | 2023-10-10 |
| 11664254 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Suguru Enokida | 2023-05-30 |
| 11031261 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Hideharu Kyouda, Koshi MUTA | 2021-06-08 |
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama, Akihiro Kubo +3 more | 2020-11-17 |
| 10649334 | Liquid processing apparatus | Koki Yoshimura, Shogo Takahasi, Yasushi Takiguchi | 2020-05-12 |
| 10558408 | Image processing apparatus which performs communication with external apparatus | — | 2020-02-11 |
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2019-06-25 |
| 10289004 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi | 2019-05-14 |
| 10128136 | Liquid processing apparatus and liquid processing method | Masahiro Fukuda, Hiroshi Ichinomiya, Koichi Obata, Kouichirou Tanaka | 2018-11-13 |
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Hideharu Kyouda, Koshi MUTA | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Yasushi Takiguchi, Hideharu Kyouda, Koshi MUTA | 2018-04-17 |
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2017-07-25 |
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2017-06-06 |
| 9625821 | Developing apparatus | Masahiro Fukuda | 2017-04-18 |
| 9575411 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi | 2017-02-21 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Masahiro Fukuda, Akihiro Kubo, Kenzi YADA, Atsushi Ookouchi | 2017-02-14 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi, Masahiro Fukuda | 2017-02-14 |
| 9470979 | Developing treatment apparatus and developing treatment method | Yasushi Takiguchi, Yoshinori Ikeda, Koki Yoshimura, Yoshiki Okamoto, Masahiro Fukuda | 2016-10-18 |
| 9386173 | Printing system, printer, job processing method and computer readable recording medium storing job processing program | — | 2016-07-05 |
| 9304398 | Developing treatment apparatus and developing treatment method | Yasushi Takiguchi, Yoshinori Ikeda, Koki Yoshimura, Yoshiki Okamoto, Masahiro Fukuda | 2016-04-05 |
| 9256131 | Developing method for developing apparatus | Hirofumi Takeguchi, Kousuke Yoshihara | 2016-02-09 |
| 9214363 | Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method | Hideharu Kyouda | 2015-12-15 |