Issued Patents All Time
Showing 26–50 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9120120 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Naoto Yoshitaka, Shuichi Nishikido, Yoichi Tokunaga | 2015-09-01 |
| 9052610 | Coating and developing system and coating and developing method | Seiki Ishida | 2015-06-09 |
| 8980013 | Substrate cleaning method and substrate cleaning apparatus | Kousuke Yoshihara, Yuichi Yoshida | 2015-03-17 |
| 8920922 | Polyurethane urea elastic fiber | Junichi Kojima | 2014-12-30 |
| 8889337 | Film forming method, film forming apparatus and pattern forming method | Hitoshi Kosugi, Yoshiaki Yamada, Yasuhito Saiga | 2014-11-18 |
| 8865396 | Developing method and developing apparatus | Hirofumi Takeguchi, Kousuke Yoshihara | 2014-10-21 |
| 8851092 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Naoto Yoshitaka, Shuichi Nishikido, Yoichi Tokunaga | 2014-10-07 |
| 8770111 | Transport vehicle and transport system | Yusuke Fujiwara | 2014-07-08 |
| 8758855 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Nobuhiro Ogata, Hiroichi Inada, Akihiro Fujimoto | 2014-06-24 |
| 8678684 | Developing method | Kousuke Yoshihara, Yuichi Yoshida | 2014-03-25 |
| 8636915 | Liquid processing apparatus and liquid processing method | Yasushi Takiguchi, Tsutomu Yamahata, Akihiro Fujimoto, Kouji Fujimura | 2014-01-28 |
| 8632295 | Transporting system, and teaching method in the transporting system | Hisashi Onishi, Shinji Fujioka, Nobuhiro Gunge | 2014-01-21 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Yasushi Takiguchi, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2013-11-12 |
| 8518494 | Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method | Hideharu Kyouda | 2013-08-27 |
| 8485513 | System for calculating spine jacket width | Kunihiko Sugimoto, Tsuyoshi Morimoto, Atsushi Ito | 2013-07-16 |
| 8474396 | Developing apparatus, resist pattern forming method and storage medium | Masahiro Fukuda, Atsushi Ookouchi | 2013-07-02 |
| 8445189 | Developing device and developing method | Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2013-05-21 |
| 8398319 | Developing apparatus, developing method, and storage medium | Hiroshi Arima, Yuichi Yoshida, Kousuke Yoshihara | 2013-03-19 |
| 8393808 | Developing method | Kousuke Yoshihara, Yuichi Yoshida | 2013-03-12 |
| 8387630 | Protective film removing device, mixed chemical solution recovering method and program storage medium | Kousuke Yoshihara | 2013-03-05 |
| 8337104 | Developing apparatus, developing method and storage medium | Yasushi Takiguchi, Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida | 2012-12-25 |
| 8333522 | Developing apparatus, developing method and storage medium | Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida, Yasushi Takiguchi | 2012-12-18 |
| 8330934 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Osamu Hirakawa | 2012-12-11 |
| 8262300 | Coating and developing apparatus, developing method and non-transitory medium | Yasushi Takiguchi, Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida | 2012-09-11 |
| 8216389 | Substrate cleaning method and substrate cleaning apparatus | Kousuke Yoshihara, Yuichi Yoshida | 2012-07-10 |