Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8889337 | Film forming method, film forming apparatus and pattern forming method | Hitoshi Kosugi, Taro Yamamoto, Yoshiaki Yamada | 2014-11-18 |
| 8702370 | Substrate transfer method for performing processes including photolithography sequence | Yuichi Yamamoto, Tadayuki Yamaguchi, Yoshiaki Yamada | 2014-04-22 |
| 8236132 | Substrate processing system and substrate transfer method | Yuichi Yamamoto, Tadayuki Yamaguchi, Yoshiaki Yamada | 2012-08-07 |
| 8133663 | Pattern forming method and apparatus | Taro Yamamoto, Hitoshi Kosugi, Yoshiaki Yamada | 2012-03-13 |
| 8007968 | Substrate processing method, program, computer-readable storage medium and substrate processing system | Yoshiaki Yamada, Tadayuki Yamaguchi, Yuuichi Yamamoto, Kazuo Sawai | 2011-08-30 |
| 7901149 | Substrate processing method, program, computer-readable recording medium, and substrate processing system | Yoshiaki Yamada, Tadayuki Yamaguchi, Yuuichi Yamamoto | 2011-03-08 |
| 7826032 | Circulation system for high refractive index liquid in pattern forming apparatus | Taro Yamamoto, Hitoshi Kosugi, Yoshiaki Yamada | 2010-11-02 |
| 7651285 | Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium | Hitoshi Kosugi, Taro Yamamoto, Yoshiaki Yamada | 2010-01-26 |