Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396911 | Determination method, control method, determination apparatus, pattern forming system and program | Keisuke Tanaka, Hiroshi Nagahata | 2016-07-19 |
| 8500950 | Exposure condition setting method, substrate processing apparatus, and computer program | Akihiro Sonoda | 2013-08-06 |
| 8007968 | Substrate processing method, program, computer-readable storage medium and substrate processing system | Yoshiaki Yamada, Tadayuki Yamaguchi, Yuuichi Yamamoto, Yasuhito Saiga | 2011-08-30 |
| 7960078 | Exposure condition setting method, substrate processing device, and computer program | Akihiro Sonoda | 2011-06-14 |