Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8500950 | Exposure condition setting method, substrate processing apparatus, and computer program | Kazuo Sawai | 2013-08-06 |
| 7960078 | Exposure condition setting method, substrate processing device, and computer program | Kazuo Sawai | 2011-06-14 |
| 6909587 | Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor wafer | — | 2005-06-21 |
| 6440614 | Mask and method of manufacturing semiconductor device | — | 2002-08-27 |
| 6432727 | Method for eliminating a static electricity on a semiconductor wafer | — | 2002-08-13 |
| 4738085 | Rotary cutter for mowers | Tadashi Nishio, Mitsuo Osakabe, Keizo Shimizu | 1988-04-19 |