Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960069 | Joining device and joining system | Shintaro Sugihara, Shigenori Kitahara, Keizo Hirose | 2018-05-01 |
| 9919509 | Peeling device, peeling system and peeling method | Osamu Hirakawa, Masaru Honda, Xavier Francois Brun, Charles Singleton | 2018-03-20 |
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai +2 more | 2017-07-25 |
| 9607869 | Bonding system | Masataka Matsunaga, Satoshi Nishimura | 2017-03-28 |
| 9330898 | Separation system, separation method, program and computer storage medium | Osamu Hirakawa, Masataka Matsunaga, Norihiko Okamoto | 2016-05-03 |
| 9165758 | Peeling system, peeling method, and computer storage medium | Yasuharu Iwashita, Masataka Matsunaga | 2015-10-20 |
| 9120120 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Shuichi Nishikido, Yoichi Tokunaga | 2015-09-01 |
| 8851092 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Shuichi Nishikido, Yoichi Tokunaga | 2014-10-07 |
| 8819923 | Joint apparatus | Takahiro Nishibayashi, Tatsuya Kitayama | 2014-09-02 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai +2 more | 2013-11-12 |
| 8088455 | Laser treatment apparatus | Norihisa Koga, Shinji Koga, Akira Nishiya | 2012-01-03 |
| 7919727 | Laser processing apparatus and laser processing method | Akira Nishiya, Norihisa Koga | 2011-04-05 |
| 7710582 | Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate | Norihisa Koga, Shinji Koga, Akira Nishiya | 2010-05-04 |
| 7622000 | Laser processing apparatus and laser processing method | Norihisa Koga, Shinji Koga, Akira Nishiya | 2009-11-24 |
| 7518087 | Laser processing apparatus and laser processing method | Norihisa Koga, Shinji Koga, Akira Nishiya | 2009-04-14 |
| 7473321 | Laser treatment apparatus | Norihisa Koga, Shinji Koga, Akira Nishiya | 2009-01-06 |