Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960069 | Joining device and joining system | Shintaro Sugihara, Naoto Yoshitaka, Keizo Hirose | 2018-05-01 |
| 8491726 | Liquid processing apparatus and process liquid supplying method | Yuji Kamikawa | 2013-07-23 |
| 8282744 | Substrate processing apparatus, substrate processing method, substrate processing program, and computer readable recording medium having substrate processing program therein | — | 2012-10-09 |
| 7108003 | Ultrasonic cleaning apparatus | — | 2006-09-19 |
| 6827814 | Processing apparatus, processing system and processing method | Hiroki Taniyama, Takanori Miyazaki, Hironobu Nishi, Yoshinori Kato | 2004-12-07 |
| 6592678 | Cleaning method and cleaning equipment | Yuji Kamikawa, Naoki Shindo, Miyako Yamasaka | 2003-07-15 |
| 6394110 | Substrate processing apparatus and substrate processing method | Yuji Kamikawa, Kinya Ueno | 2002-05-28 |
| 6318386 | Treatment apparatus | Yuji Kamikawa, Naoki Shindo | 2001-11-20 |
| 6299696 | Substrate processing apparatus and substrate processing method | Yuji Kamikawa, Kinya Ueno | 2001-10-09 |
| 6293288 | Cleaning method and apparatus | Naoki Shindo, Hironobu Hyakutake | 2001-09-25 |
| 6253775 | Cleaning apparatus | Keiji Taguchi, Hiroko Tsuboi | 2001-07-03 |
| 6203627 | Cleaning method | Naoki Shindo, Hironobu Hyakutake | 2001-03-20 |
| 6158447 | Cleaning method and cleaning equipment | Yuji Kamikawa, Naoki Shindo, Miyako Yamasaka | 2000-12-12 |
| 6138698 | Ultrasonic cleaning apparatus | Hiroshi Tanaka, Kokichi Hiroshiro | 2000-10-31 |
| 6082381 | Treatment apparatus | Yuji Kamikawa, Naoki Shindo | 2000-07-04 |
| 6029371 | Drying treatment method and apparatus | Yuji Kamikawa, Teruomi Minami | 2000-02-29 |
| 6009890 | Substrate transporting and processing system | Satoshi Kaneko, Yuji Kamikawa, Akira Koguchi, Osamu Kuroda, Tatsuya Nishida | 2000-01-04 |
| 5911232 | Ultrasonic cleaning device | Shori Mokuo, Keiji Taguchi | 1999-06-15 |
| 5817185 | Method for washing substrates | Naoki Shindo, Takayuki Toshima, Kenji Yokomizo | 1998-10-06 |
| 5730162 | Apparatus and method for washing substrates | Naoki Shindo, Takayuki Toshima, Kenji Yokomizo | 1998-03-24 |
| 5482068 | Cleaning apparatus | Takashi Terada | 1996-01-09 |