Issued Patents All Time
Showing 1–25 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551931 | Substrate processing apparatus, substrate processing method, and storage medium storing program for executing substrate processing method | Koji Kagawa | 2023-01-10 |
| 11441101 | Cleaning composition, cleaning method, and method for manufacturing semiconductor | Isao Hirano, Kazumasa Wakiya, Shoichi Terada, Junji Nakamura | 2022-09-13 |
| 11355362 | Washing method, washing device, storage medium, and washing composition | Isao Hirano, Shoichi Terada, Junji Nakamura | 2022-06-07 |
| 10844332 | Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal | Hiroshi Marumoto, Yoshinori Nishiwaki, Trace Hurd | 2020-11-24 |
| 10347482 | Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method | Shoichi Terada, Junji Nakamura | 2019-07-09 |
| 10333062 | Substrate liquid processing method, substrate liquid processing apparatus, and storage medium | Yasushi Fujii | 2019-06-25 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii | 2018-08-14 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Keiji Tanouchi, Kazuyuki Mitsuoka, Takehiko Orii | 2018-01-30 |
| 9731322 | Plating apparatus, plating method and storage medium having plating program stored thereon | Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita | 2017-08-15 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 9421569 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita | 2016-08-23 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Mitsuaki Iwashita, Yuji Kamikawa, Mikio Nakashima | 2016-01-12 |
| 9076643 | Supercritical processing apparatus, substrate processing system and supercritical processing method | Kazuo Terada | 2015-07-07 |
| 8770138 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Mitsuaki Iwashita, Takashi Tanaka, Takehiko Orii | 2014-07-08 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2014-07-08 |
| 8701308 | Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method | Koukichi Hiroshiro | 2014-04-22 |
| 8652344 | Liquid treatment method and storage system | Kotaro Tsurusaki, Hiroshi Tanaka, Kazuyoshi Eshima | 2014-02-18 |
| 8617656 | Liquid processing apparatus, liquid processing method, and storage medium | Mitsunori Nakamori, Akira Fujita | 2013-12-31 |
| 8465596 | Supercritical processing apparatus and supercritical processing method | Mitsuaki Iwashita, Kazuyuki Mitsuoka, Hidekazu Okamoto, Hideo Namatsu | 2013-06-18 |
| 8434423 | Substrate carrying apparatus having circumferential sidewall and substrate processing system | Kazuo Terada | 2013-05-07 |