Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2024-12-31 |
| 12042815 | Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method | Koji Yamashita, Yusuke Yamamoto, Koji Tanaka, Kouzou Kanagawa | 2024-07-23 |
| 11978644 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2024-05-07 |
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Teruaki Konishi, Kouzou Kanagawa, Osamu Kuroda, Koji Tanaka, Hidemasa Aratake +2 more | 2023-03-28 |
| 11476130 | Substrate processing apparatus, substrate processing method, and storage medium | Koji Yamashita, Kazuya Koyama, Kouzou Kanagawa | 2022-10-18 |
| 11469114 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2022-10-11 |
| 11404294 | Substrate processing apparatus, substrate processing method, and storage medium | Kazuya Koyama, Koji Yamashita | 2022-08-02 |
| 8652344 | Liquid treatment method and storage system | Hiroshi Tanaka, Takayuki Toshima, Kazuyoshi Eshima | 2014-02-18 |
| 7836900 | Substrate processing system, substrate processing method, recording medium and software | Takayuki Toshima, Naoki Shindo, Hiroshi Yano | 2010-11-23 |
| 7581335 | Substrate drying processing apparatus, method, and program recording medium | Hiroshi Tanaka, Hidetoshi Nakao, Naoki Shindo, Atushi Yamashita, Tsukasa Hirayama | 2009-09-01 |
| 6247479 | Washing/drying process apparatus and washing/drying process method | Hiroki Taniyama, Yuji Kamikawa | 2001-06-19 |