Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170209 | Substrate processing apparatus and substrate processing method | Takashi Yabuta, Masatoshi Kasahara, Daisuke Saiki | 2024-12-17 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 7581335 | Substrate drying processing apparatus, method, and program recording medium | Hiroshi Tanaka, Naoki Shindo, Atushi Yamashita, Tsukasa Hirayama, Kotaro Tsurusaki | 2009-09-01 |