Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027394 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuki Kosai | 2024-07-02 |
| 11769661 | Substrate processing method and substrate processing apparatus | Hirofumi Takeguchi, Takahisa Otsuka, Suguen Lee | 2023-09-26 |
| 11676835 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuki Kosai | 2023-06-13 |
| 11569086 | Substrate processing apparatus and substrate processing method | Kazuki Kosai | 2023-01-31 |
| 11551935 | Substrate processing method and substrate processing apparatus | Takashi Nakazawa | 2023-01-10 |
| 10937669 | Substrate solution-treatment apparatus, treatment solution supplying method and storage medium | Kosuke FUKUDA, Mikio Nakashima, Hiroyuki Higashi | 2021-03-02 |
| 10832902 | Substrate processing apparatus and substrate processing method | Yoshinori Ikeda, Yuki Taniguchi | 2020-11-10 |
| 10685858 | Substrate processing method and substrate processing apparatus | Hiroyuki Higashi, Takahisa Otsuka, Takashi Nakazawa, Seiya Fujimoto, Yuichi Douki | 2020-06-16 |
| 10475638 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium having stored thereon substrate processing program | Yuki Yoshida | 2019-11-12 |
| 10192758 | Substrate processing apparatus | Yosuke Kawabuchi, Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi +1 more | 2019-01-29 |
| 9805957 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Yosuke Kawabuchi, Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi +1 more | 2017-10-31 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Hidetoshi Nakao, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshihiro Kai, Yoshinori Ikeda, Tetsuya Oda, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 4445793 | Bearing | — | 1984-05-01 |
| 4397510 | Capsule connector | Takafumi Asada | 1983-08-09 |
| 4395817 | Method of making keyboard switches | Takafumi Asada, Kanji Kiyohara, Tadashi Sakairi | 1983-08-02 |