Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915944 | Substrate processing apparatus and substrate processing method | — | 2024-02-27 |
| 11769661 | Substrate processing method and substrate processing apparatus | Hirofumi Takeguchi, Kazuyoshi Shinohara, Takahisa Otsuka | 2023-09-26 |