Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862486 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto | 2024-01-02 |
| 11769661 | Substrate processing method and substrate processing apparatus | Hirofumi Takeguchi, Kazuyoshi Shinohara, Suguen Lee | 2023-09-26 |
| 11712710 | Substrate processing apparatus and substrate processing method | Fumihiro Kamimura, Hiroshi Komiya, Nobuhiro Ogata | 2023-08-01 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Jiro Higashijima, Nobuhiro Ogata, Yuichi Douki, Yusuke Hashimoto +2 more | 2021-06-01 |
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto | 2020-09-08 |
| 10685858 | Substrate processing method and substrate processing apparatus | Hiroyuki Higashi, Kazuyoshi Shinohara, Takashi Nakazawa, Seiya Fujimoto, Yuichi Douki | 2020-06-16 |
| 9865483 | Substrate liquid processing method, substrate liquid processing apparatus, and recording medium | Hiroyuki Higashi, Gentaro Goshi | 2018-01-09 |
| 9108228 | Liquid processing apparatus having switchable nozzles | Hirotaka Maruyama, Nobuhiro Ogata, Kazuyuki Kudo | 2015-08-18 |
| 8871301 | Coating treatment apparatus, coating treatment method, and non-transitory computer storage medium | Kouzou Tachibana, Akira Nishiya | 2014-10-28 |
| 8587763 | Substrate processing method, substrate processing system, and computer-readable recording medium recording program thereon | — | 2013-11-19 |
| 8247164 | Resist film forming method | — | 2012-08-21 |
| 8181356 | Substrate processing method | Tsuyoshi Shibata | 2012-05-22 |
| 8168378 | Substrate treatment system, substrate treatment method, and computer readable storage medium | Tsuyoshi Shibata | 2012-05-01 |
| 7977038 | Substrate processing method, substrate processing system, and computer-readable recording medium recording program thereon | — | 2011-07-12 |
| 7938587 | Substrate processing method, computer storage medium and substrate processing system | — | 2011-05-10 |
| 7877895 | Substrate processing apparatus | Tsuyoshi Shibata | 2011-02-01 |
| 7816276 | Substrate treatment system, substrate treatment method, and computer readable storage medium | Tsuyoshi Shibata | 2010-10-19 |
| 7628612 | Heat treatment apparatus, heat treatment method, and computer readable storage medium | Tsuyoshi Shibata | 2009-12-08 |