Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923220 | Substrate processing apparatus | Naoyuki Okamura | 2024-03-05 |
| 10192731 | Liquid processing method, substrate processing apparatus, and storage medium | — | 2019-01-29 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto +3 more | 2018-09-04 |
| 10037901 | Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium | Kazuya Koyama, Hiromi Kiyose, Katsufumi MATSUKI, Shuhei Takahashi, Hideki Nishimura +1 more | 2018-07-31 |
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Shinichiro Shimomura, Teruomi Minami +3 more | 2016-06-07 |
| 9108228 | Liquid processing apparatus having switchable nozzles | Takahisa Otsuka, Nobuhiro Ogata, Kazuyuki Kudo | 2015-08-18 |
| 8978671 | Substrate processing method and substrate processing apparatus | Satoru Tanaka, Takehiko Orii, Teruomi Minami, Mitsunori Nakamori | 2015-03-17 |
| 8906165 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Teruomi Minami, Naoyuki Okamura, Yosuke Kawabuchi | 2014-12-09 |
| 8308870 | Cleaning apparatus, cleaning method and recording medium | Teruomi Minami, Takashi Yabuta, Satoru Tanaka, Kouichi Eguchi | 2012-11-13 |
| 4401657 | Nutrient composition suitable for enteral feeding | Norio Kashiwabara, Tetuo Ishii, Satoru Kondo | 1983-08-30 |