Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362202 | Substrate processing method and substrate processing apparatus | Fumihiro Kamimura, Masatoshi Kasahara, Teruomi Minami | 2025-07-15 |
| 11869777 | Substrate processing method and substrate processing apparatus | Fumihiro Kamimura, Masatoshi Kasahara, Teruomi Minami | 2024-01-09 |
| 11094568 | Processing apparatus, abnormality detection method, and storage medium | Kenji Nakamizo, Satoshi Morita, Akinori Tanaka, Hiroshi Komiya, Mikio Nakashima +3 more | 2021-08-17 |
| 10128138 | Substrate transfer method and storage medium | Katsuhiro Morikawa, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2018-11-13 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto, Takashi Uno +3 more | 2018-09-04 |
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Katsuhiro Morikawa, Suguru Enokida | 2017-09-26 |
| 9696262 | Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium | Katsuhiro Morikawa | 2017-07-04 |
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2017-04-18 |
| 8707893 | Substrate treatment system, substrate treatment method, and non-transitory computer storage medium | Masatoshi Deguchi, Hideo Funakoshi, Toshichika Takei, Norifumi Sato, Wataru Kiyota +3 more | 2014-04-29 |