Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735439 | Substrate processing system and method for supplying processing fluid | Hiroaki Inadomi, Satoshi Okamura | 2023-08-22 |
| 11482427 | Substrate processing system and method for supplying processing fluid | Hiroaki Inadomi, Satoshi Okamura | 2022-10-25 |
| 10796897 | Supercritical fluid producing apparatus and substrate processing apparatus | — | 2020-10-06 |
| 10593571 | Substrate processing apparatus | Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Satoshi Okamura, Satoshi Biwa +4 more | 2020-03-17 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Ikuo Sunaka, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto, Takashi Uno +3 more | 2018-09-04 |