Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057327 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Yuichi Douki, Satoshi Okamura, Katsuhiro Ookawa, Yuichiro KUNUGIMOTO | 2024-08-06 |
| 11557492 | Substrate processing apparatus and control method thereof | Satoshi Okamura, Gentaro Goshi | 2023-01-17 |
| 11295965 | Cleaning apparatus and cleaning method of substrate processing apparatus | Kohei Yamada, Hiroaki Inadomi | 2022-04-05 |
| 10679845 | Substrate processing apparatus having cooling member | Hiroaki Inadomi, Satoshi Okamura | 2020-06-09 |
| 10619922 | Substrate processing apparatus, substrate processing method, and storage medium | Gentaro Goshi, Hiromi Kiyose | 2020-04-14 |
| 10593571 | Substrate processing apparatus | Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura +4 more | 2020-03-17 |
| 10381246 | Substrate processing apparatus | Satoshi Okamura | 2019-08-13 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Norihiro Ito, Jiro Higashijima | 2019-04-30 |
| 8671875 | Liquid processing apparatus, liquid processing method and storage medium | Shuichi Nagamine, Naofumi Kishita, Kouji Fujimura | 2014-03-18 |