Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Hiroaki Inadomi, Shota Umezaki, Suguru Enokida | 2025-03-18 |
| 11139181 | Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block | Hiroaki Inadomi, Tooru Nakamura, Yoshihisa Aoyama | 2021-10-05 |
| 10593571 | Substrate processing apparatus | Hiroaki Inadomi, Tooru Nakamura, Yasuo Kiyohara, Satoshi Okamura, Satoshi Biwa +4 more | 2020-03-17 |
| 8845262 | Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program | Akira Murata, Issei Ueda, Osamu Kuroda, Masahiro Yoshida | 2014-09-30 |