Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391472 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Naruaki Iida, Kousei Ide | 2025-08-19 |
| 12312184 | Substrate transfer device and substrate transfer method | Tatsuhiko Tsujihashi, Kazuki Matsushita | 2025-05-27 |
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Hiroaki Inadomi, Shota Umezaki, Kouji Kimoto | 2025-03-18 |
| 12255063 | Substrate processing system and substrate processing method | Hayato TANOUE, Takashi Uno, Satoshi Ookawa | 2025-03-18 |
| 12198961 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Taro Yamamoto | 2025-01-14 |
| D1012311 | Holding pad for carrying substrate | Tatsuhiko Tsujihashi, Kazuki Matsushita | 2024-01-23 |
| D1011550 | Holding pad for carrying substrate | Tatsuhiko Tsujihashi, Kazuki Matsushita | 2024-01-16 |
| 11869789 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Taro Yamamoto | 2024-01-09 |
| 11664254 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Taro Yamamoto | 2023-05-30 |
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara +2 more | 2022-10-18 |
| 11211278 | Substrate processing apparatus and substrate processing method | Akihiro Teramoto, Masashi Tsuchiyama, Keisuke Sasaki | 2021-12-28 |
| 11099480 | Treatment solution supply apparatus and treatment solution supply method | Takahiro Ookubo, Toshinobu Furusho | 2021-08-24 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara +2 more | 2019-12-10 |
| 9984904 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2018-05-29 |
| 9984905 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2018-05-29 |
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Katsuhiro Morikawa, Ikuo Sunaka | 2017-09-26 |
| 9460947 | Coating and developing apparatus and method, and storage medium | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2016-10-04 |
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2016-10-04 |
| 9417529 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Hiroshi Tomita, Makoto Hayakawa +1 more | 2016-08-16 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Yuichi Douki, Tokutarou Hayashi, Naruaki Iida | 2016-03-29 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2016-03-15 |
| 9082800 | Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium | Masahiro Nakaharada, Hidekazu Kiyama, Naruaki Iida, Akira Miyata | 2015-07-14 |
| 9030656 | Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device | Hideki Kajiwara, Junnosuke Maki | 2015-05-12 |
| 8985880 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Hiroshi Tomita, Makoto Hayakawa +1 more | 2015-03-24 |
| 8985929 | Substrate processing apparatus, substrate processing method and storage medium | Masahiro Nakaharada, Akira Miyata, Hidekazu Kiyama, Naruaki Iida | 2015-03-24 |