Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431374 | Information acquisition system and information acquisition method | Koudai Higashi, Ryo Konishi | 2025-09-30 |
| 12176227 | State determination device, state determination method, and computer-readable recording medium | Masaomi Toyonaga, Atsushi Ohta, Motoi Okada, Takuro Tsutsui, Kei Sano +1 more | 2024-12-24 |
| 11920240 | Substrate processing apparatus, state determination method and computer-readable recording medium | Ryo Araki, Mitsuteru Yano, Masato Hayashi | 2024-03-05 |
| 11201068 | Heat treatment apparatus, method of managing heat treatment apparatus and storage medium | Shinichiro Misaka | 2021-12-14 |
| 9030656 | Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device | Hideki Kajiwara, Suguru Enokida | 2015-05-12 |
| 8707805 | Transfer apparatus and transfer method | Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda, Suguru Enokida +2 more | 2014-04-29 |