Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12260548 | Abnormality detection apparatus and abnormality detection method | — | 2025-03-25 |
| 12244972 | Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium | Yuichiro KUNUGIMOTO, Keishi Hamada, Takafumi Hayama, Shoki HAMAGUCHI | 2025-03-04 |
| 12176227 | State determination device, state determination method, and computer-readable recording medium | Junnosuke Maki, Masaomi Toyonaga, Atsushi Ohta, Takuro Tsutsui, Kei Sano +1 more | 2024-12-24 |
| 11928810 | Abnormality detection apparatus and abnormality detection method | — | 2024-03-12 |
| 11598007 | Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method | Nao Akashi, Yuta Haga, Hiroyuki Sato, Kei Sano, Junya Sato +4 more | 2023-03-07 |
| 9927373 | Substrate processing apparatus, monitoring device of substrate processing apparatus, and monitoring method of substrate processing apparatus | Shigeyuki IIDA | 2018-03-27 |
| 8989477 | Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Yasutoshi Umehara, Shuji Iwanaga | 2015-03-24 |
| 7515029 | Starting device for single-phase induction motor | Mikio Sahashi, Akihiko Matsuya, Shinichi Iwasaki, Kazuo Itoh | 2009-04-07 |