Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243213 | Substrate inspection device, substrate inspection system, and substrate inspection method | Tadashi Nishiyama | 2025-03-04 |
| 11636585 | Substrate defect inspection apparatus, substrate defect inspection method, and storage medium | — | 2023-04-25 |
| 11227381 | Substrate defect inspection apparatus, substrate defect inspection method, and storage medium | — | 2022-01-18 |
| 10818004 | Substrate defect inspection apparatus, substrate defect inspection method, and storage medium | — | 2020-10-27 |
| 9355442 | Film thickness measurement apparatus, film thickness measurement method, and non-transitory computer storage medium | Tadashi Nishiyama, Kanzou Katou | 2016-05-31 |
| 9342880 | Defect analyzing apparatus, substrate processing system, defect analyzing method and computer-readable storage medium | Tadashi Nishiyama, Hiroshi Tomita, Izumi Hasegawa | 2016-05-17 |
| 9229337 | Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium | Shinobu Miyazaki, Hiroshi Tomita | 2016-01-05 |
| 9146479 | Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage medium | Izumi Hasegawa, Hiroshi Tomita, Tadashi Nishiyama | 2015-09-29 |
| 9097681 | Inspection device, bonding system and inspection method | Shinji Koga, Akinori Miyahara, Hiroshi Tomita, Takeshi Tamura | 2015-08-04 |
| 9039863 | Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program | Shuhei Matsumoto, Hiroshi Tomita, Kenji Nakamizo, Satoshi Morita | 2015-05-26 |
| 8989477 | Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Yasutoshi Umehara, Motoi Okada | 2015-03-24 |
| 8874254 | Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon | Nobuyuki Sata | 2014-10-28 |
| 8873849 | Image processing method, image display method, image processing apparatus and a non-transitory computer-readable recording medium | Shinobu Miyazaki | 2014-10-28 |
| 8379965 | Defect classification method, computer storage medium, and defect classification apparatus | — | 2013-02-19 |
| 8311316 | Defect inspecting method, defect inspecting apparatus, and storage medium storing defect inspection program | — | 2012-11-13 |
| 8212869 | Substrate inspection method, substrate inspection system and storage medium | Kazuya Hisano | 2012-07-03 |
| 8014895 | Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon | Nobuyuki Sata | 2011-09-06 |
| 7815366 | Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereon | Kouji Okamura, Hiroshi Tomita, Shinichiro Araki | 2010-10-19 |