Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9028272 | Foreign material removing structure for charger | Mamoru Sakai | 2015-05-12 |
| 8676478 | Engine stop control device | Yasuhiro Nakai, Masatomo Yoshihara | 2014-03-18 |
| 7844359 | Coating and developing apparatus, operating method for same, and storage medium for the method | Tomonori Shin, Tomohiro Kaneko, Akira Miyata, Syuzo Fujimaru | 2010-11-30 |
| 7815366 | Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereon | Hiroshi Tomita, Shuji Iwanaga, Shinichiro Araki | 2010-10-19 |
| 7060115 | Substrate processing method, substrate processing apparatus and substrate carrying method | Hiroharu Hashiguchi | 2006-06-13 |
| 6568847 | Judging method and processing apparatus | Yuuichi Nishijima | 2003-05-27 |
| 6461986 | Substrate processing method apparatus and substrate carrying method | Hiroharu Hashiguchi | 2002-10-08 |
| 6147329 | Resist processing system and resist processing method | Masami Akimoto | 2000-11-14 |
| 5849602 | Resist processing process | Masami Akimoto | 1998-12-15 |
| 5751673 | Quick response optical disk system providing accurate displacement of a pick-up and method therefor | Noriaki Yokota | 1998-05-12 |
| 5711782 | Process for fabricating an optical fiber preform | Tadao Arima | 1998-01-27 |
| 5284500 | Process for fabricating an optical fiber preform | Tadao Arima | 1994-02-08 |
| 5071212 | Optical fiber polarizer and process of production thereof | Akitoshi Mesaki, Norio Suzuki, Tadao Arima, Shinya Inagaki | 1991-12-10 |