TS

Tomonori Shin

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,311,264 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7844359 Coating and developing apparatus, operating method for same, and storage medium for the method Kouji Okamura, Tomohiro Kaneko, Akira Miyata, Syuzo Fujimaru 2010-11-30