Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519717 | Film thickness measuring system and film thickness measuring method | — | 2022-12-06 |
| 11226191 | Film thickness measurement device and correction method | — | 2022-01-18 |
| 8989477 | Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Motoi Okada, Shuji Iwanaga | 2015-03-24 |
| 8751196 | Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus | Tsuyoshi Moriya, Yuki KATAOKA, Michiko Nakaya | 2014-06-10 |
| 5999005 | Voltage and displacement measuring apparatus and probe | Akira Fujii, Yoko Sato, Soichi Hama, Kazuyuki Ozaki, Yoshiro Goto +1 more | 1999-12-07 |
| 5677635 | Voltage and displacement measuring apparatus and probe | Akira Fujii, Yoko Sato, Soichi Hama, Kazuyuki Ozaki, Yoshiro Goto +1 more | 1997-10-14 |
| 5550479 | Signal measuring apparatus and signal measuring method | Shinichi Wakana, Kazuyuki Ozaki, Yoshiro Goto | 1996-08-27 |