Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8874254 | Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon | Shuji Iwanaga | 2014-10-28 |
| 8014895 | Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon | Shuji Iwanaga | 2011-09-06 |
| 7977609 | Temperature measuring device using oscillating frequency signals | Takahiro Kitano, Tetsuo Fukuoka, Toshiyuki Matsumoto, Tomohide Minami | 2011-07-12 |
| RE40052 | Heat treatment apparatus | Eiichi Shirakawa | 2008-02-12 |
| 7316515 | Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid | Shouichi Terada | 2008-01-08 |
| 7241633 | Heat treatment apparatus and heat treatment method | — | 2007-07-10 |
| 7049553 | Substrate processing apparatus and substrate processing method | Kenichi Shigetomi, Toshichika Takei, Masatoshi Kaneda | 2006-05-23 |
| 6450803 | Heat treatment apparatus | Eiichi Shirakawa | 2002-09-17 |
| 6380518 | Heat treatment apparatus and substrate processing system | Eiichi Shirakawa | 2002-04-30 |
| 6291800 | Heat treatment apparatus and substrate processing system | Eiichi Shirakawa | 2001-09-18 |
| 6229116 | Heat treatment apparatus | Eiichi Shirakawa | 2001-05-08 |
| 6222161 | Heat treatment apparatus | Eiichi Shirakawa | 2001-04-24 |
| 6191394 | Heat treating apparatus | Eiichi Shirakawa | 2001-02-20 |
| 5517067 | Miniature D.C. motor provided with rotation detector | — | 1996-05-14 |
| 5079468 | Miniature motor with revolution-detecting generator | — | 1992-01-07 |
| 5070269 | Miniature motor having a frequency generator | Jun Tamaki | 1991-12-03 |
| 5022498 | Method and apparatus for controlling a group of elevators using fuzzy rules | Kenji Sasaki, Kenji Yokota, Hiroshi Hattori | 1991-06-11 |
| 5013946 | Miniature motor with a frequency generator | — | 1991-05-07 |