Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9021385 | Computer-readable storage medium having stored thereon display control program, display control system, display control apparatus, and display control method | Shohei Mizutani, Tomohiro Fujii, Yumi Todo | 2015-04-28 |
| 8963964 | Computer-readable storage medium having display control program stored therein, display control method, display control system, and display control apparatus | — | 2015-02-24 |
| RE40052 | Heat treatment apparatus | Nobuyuki Sata | 2008-02-12 |
| 6841342 | Substrate processing apparatus and substrate processing method | Takanori Nishi | 2005-01-11 |
| 6753508 | Heating apparatus and heating method | — | 2004-06-22 |
| 6744020 | Heat processing apparatus | Tetsuo Fukuoka, Tsuyoshi Nogami | 2004-06-01 |
| 6644964 | Substrate processing apparatus and substrate processing method | Toshichika Takei | 2003-11-11 |
| 6474986 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Mitsuhiro Tanoue, Toshichika Takei | 2002-11-05 |
| 6450803 | Heat treatment apparatus | Nobuyuki Sata | 2002-09-17 |
| 6380518 | Heat treatment apparatus and substrate processing system | Nobuyuki Sata | 2002-04-30 |
| 6291800 | Heat treatment apparatus and substrate processing system | Nobuyuki Sata | 2001-09-18 |
| 6228171 | Heat processing apparatus | — | 2001-05-08 |
| 6229116 | Heat treatment apparatus | Nobuyuki Sata | 2001-05-08 |
| 6222161 | Heat treatment apparatus | Nobuyuki Sata | 2001-04-24 |
| 6191394 | Heat treating apparatus | Nobuyuki Sata | 2001-02-20 |
| 5249142 | Indirect temperature-measurement of films formed on semiconductor wafers | Masafumi Nomura, Kimiharu Matsumura | 1993-09-28 |
| 5225663 | Heat process device | Kimiharu Matsumura | 1993-07-06 |
| 5070813 | Coating apparatus | Hiroyuki Sakai, Chizo Yamaguchi, Takashi Takekuma | 1991-12-10 |
| 5038608 | Method for measuring the flow rate of exhaust gas | Hiroyuki Sakai, Kimiharu Matsumura | 1991-08-13 |