Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5151871 | Method for heat-processing semiconductor device and apparatus for the same | Kimiharu Matsumura, Hiroyuki Sakai, Masaaki Murakami, Tetsuya Oda | 1992-09-29 |
| 5070813 | Coating apparatus | Hiroyuki Sakai, Eiichi Shirakawa, Takashi Takekuma | 1991-12-10 |