Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5445699 | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface | Yuuji Kamikawa, Masafumi Nomura, Junichi Nagata | 1995-08-29 |
| 5254367 | Coating method and apparatus | Hiroyuki Sakai | 1993-10-19 |
| 5249142 | Indirect temperature-measurement of films formed on semiconductor wafers | Eiichi Shirakawa, Masafumi Nomura | 1993-09-28 |
| 5225663 | Heat process device | Eiichi Shirakawa | 1993-07-06 |
| 5151871 | Method for heat-processing semiconductor device and apparatus for the same | Hiroyuki Sakai, Masaaki Murakami, Tetsuya Oda, Chizo Yamaguchi | 1992-09-29 |
| 5038608 | Method for measuring the flow rate of exhaust gas | Hiroyuki Sakai, Eiichi Shirakawa | 1991-08-13 |
| 4812201 | Method of ashing layers, and apparatus for ashing layers | Hiroyuki Sakai, Kazutoshi Yoshioka, Keisuke Shigaki, Yutaka Amemiya, Shunichi Iimuro +2 more | 1989-03-14 |