Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551400 | Coating apparatus | Keizo Hasbe, Shuuichi Nishikido, Nobuo Konishi, Takayuki Toshima | 2003-04-22 |
| 6503003 | Film forming method and film forming apparatus | Keizo Hasebe, Shuuichi Nishikido, Nobuo Konishi, Takayuki Toshima | 2003-01-07 |
| 6268013 | Coating a resist film, with pretesting for particle contamination | Masami Akimoto, Kazuo Sakamoto, Norio Semba | 2001-07-31 |
| 6261744 | Baking apparatus and baking method | — | 2001-07-17 |
| 6228561 | Film forming method and film forming apparatus | Keizo Hasebe, Shuuichi Nishikido, Nobuo Konishi, Takayuki Toshima | 2001-05-08 |
| 6168667 | Resist-processing apparatus | — | 2001-01-02 |
| 6051349 | Apparatus for coating resist and developing the coated resist | Kunie Ogata | 2000-04-18 |
| 6002108 | Baking apparatus and baking method | — | 1999-12-14 |
| 5968691 | Method and apparatus for coating resist and developing the coated resist | Kunie Ogata | 1999-10-19 |
| 5938847 | Method and apparatus for coating a film on an object being processed | Masami Akimoto, Kazuo Sakamoto, Norio Semba | 1999-08-17 |
| 5460478 | Method for processing wafer-shaped substrates | Masami Akimoto, Naruaki Iida | 1995-10-24 |
| 5364222 | Apparatus for processing wafer-shaped substrates | Masami Akimoto, Naruaki Iida | 1994-11-15 |
| 5297910 | Transportation-transfer device for an object of treatment | Kenji Yokomizo, Masami Akimoto, Yuji Yoshimoto | 1994-03-29 |
| 4812201 | Method of ashing layers, and apparatus for ashing layers | Hiroyuki Sakai, Kimiharu Matsumura, Keisuke Shigaki, Yutaka Amemiya, Shunichi Iimuro +2 more | 1989-03-14 |