Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391472 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Suguru Enokida, Kousei Ide | 2025-08-19 |
| 12381102 | Substrate processing apparatus and substrate processing method | Kousei Ide, Kazuya Matsushita | 2025-08-05 |
| 12368069 | Substrate transfer device including housing provided with fan | Kousei Ide | 2025-07-22 |
| 12151255 | Coating apparatus and coating method | Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Kohei Kawakami +1 more | 2024-11-26 |
| 11978655 | Substrate transfer mechanism and substrate transferring method | Kousei Ide | 2024-05-07 |
| 11752515 | Coating apparatus and coating method | Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Kohei Kawakami +1 more | 2023-09-12 |
| 11705359 | Substrate transfer mechanism and substrate transferring method | Kousei Ide | 2023-07-18 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |
| 10042356 | Substrate processing apparatus, method for correcting positional displacement, and storage medium | Katsuhiro Morikawa | 2018-08-07 |
| 9818654 | Substrate processing apparatus and substrate processing method | Masato Hayashi, Kohei Noguchi, Kenji Iizuka | 2017-11-14 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Yuichi Douki, Tokutarou Hayashi, Suguru Enokida | 2016-03-29 |
| 9214370 | Substrate transfer device, substrate transfer method, and storage medium | Akihiro Teramoto | 2015-12-15 |
| 9082800 | Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium | Suguru Enokida, Masahiro Nakaharada, Hidekazu Kiyama, Akira Miyata | 2015-07-14 |
| 8985929 | Substrate processing apparatus, substrate processing method and storage medium | Suguru Enokida, Masahiro Nakaharada, Akira Miyata, Hidekazu Kiyama | 2015-03-24 |
| 8755935 | Substrate holder positioning method and substrate processing system | Yuichi Douki, Tokutarou Hayashi, Suguru Enokida | 2014-06-17 |
| 8720873 | Substrate holding device | Shinichi Hayashi, Suguru Enokida, Hideki Kajiwara | 2014-05-13 |
| 8707805 | Transfer apparatus and transfer method | Junnosuke Maki, Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda +2 more | 2014-04-29 |
| D701498 | Arm for wafer transportation for manufacturing semiconductor | Hideki Kajiwara | 2014-03-25 |
| D695240 | Arm for wafer transportation for manufacturing semiconductor | Hideki Kajiwara | 2013-12-10 |
| 8528889 | Device and method for supporting a substrate | Seiji Nakano, Michiaki Matsushita, Suguru Enokida, Katsuhiro Morikawa | 2013-09-10 |
| 8441618 | Substrate transfer method and apparatus | Masahiro Nakaharada, Katsuhiro Morikawa, Suguru Enokida | 2013-05-14 |
| D674761 | Wafer holding member | Hideki Kajiwara | 2013-01-22 |
| 8292549 | Substrate carrying device, substrate carrying method and computer-readable storage medium | — | 2012-10-23 |
| 7993081 | Substrate carrying device, substrate carrying method and computer-readable storage medium | — | 2011-08-09 |
| 7758340 | Heating device and heating method | Masami Akimoto, Shinichi Hayashi, Hiroaki Inadomi | 2010-07-20 |