Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300526 | Substrate processing control method, substrate processing apparatus and storage medium | Toyohisa Tsuruda | 2025-05-13 |
| 11862496 | Substrate processing control method, substrate processing apparatus and storage medium | Toyohisa Tsuruda | 2024-01-02 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Naruaki Iida, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |
| 9704367 | Clean-room monitoring device and method for monitoring clean-room | Atsushi Suzuki, Kazuya Uoyama, Daisuke Oku, Yoshitada Honda | 2017-07-11 |
| 8135487 | Temperature setting method and apparatus for a thermal processing plate | Megumi Jyousaka, Masahide Tadokoro, Shinichi Shinozuka, Kunie Ogata | 2012-03-13 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Masahide Tadokoro, Megumi Jyousaka, Shinichi Shinozuka, Kunie Ogata | 2011-06-07 |
| 7897897 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka | 2011-03-01 |
| 6914087 | Process for producing powder coating composition, powder coating composition, and method of coating film formation | Katsuhiko Okada, Tetsuro Agawa, Kouji Shinohara | 2005-07-05 |