Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832026 | Substrate imaging apparatus | Tadashi Nishiyama, Yasuaki Noda | 2023-11-28 |
| 11733612 | Substrate processing apparatus and method of processing substrate | Kazuya Iwata | 2023-08-22 |
| 11353792 | Substrate processing apparatus | — | 2022-06-07 |
| 11256172 | Light irradiating device, light irradiating method and recording medium | Takaya Kikai, Masaru Tomono | 2022-02-22 |
| 10958879 | Substrate imaging apparatus | Tadashi Nishiyama, Yasuaki Noda | 2021-03-23 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Yoshitaka Konishi, Naruaki Iida, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Ryoji Ikebe, Yasuaki Noda, Keisuke Hamamoto, Masato Hosaka | 2020-07-07 |
| 10642168 | Auxiliary exposure apparatus and exposure amount distribution acquisition method | Hideaki Kashiwagi, Takafumi Niwa | 2020-05-05 |
| 10523905 | Substrate imaging apparatus | Tadashi Nishiyama, Yasuaki Noda | 2019-12-31 |
| 9025852 | Substrate inspection apparatus and method for operating the same | Kazuya Hisano, Hiroshi Tomita, Tadashi Nishiyama, Makoto Hayakawa | 2015-05-05 |
| 8730317 | Substrate processing apparatus, substrate processing method and non-transitory computer storage medium | — | 2014-05-20 |
| 8257605 | Apparatus and method for removing coating film | Shinji Kobayashi | 2012-09-04 |
| 8088455 | Laser treatment apparatus | Shinji Koga, Naoto Yoshitaka, Akira Nishiya | 2012-01-03 |
| 7919727 | Laser processing apparatus and laser processing method | Akira Nishiya, Naoto Yoshitaka | 2011-04-05 |
| 7879251 | Thin film removing device and thin film removing method | Shinji Kobayashi | 2011-02-01 |
| 7710582 | Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate | Shinji Koga, Naoto Yoshitaka, Akira Nishiya | 2010-05-04 |
| 7641763 | Apparatus and method for removing coating film | Shinji Kobayashi | 2010-01-05 |
| 7622000 | Laser processing apparatus and laser processing method | Shinji Koga, Naoto Yoshitaka, Akira Nishiya | 2009-11-24 |
| 7518087 | Laser processing apparatus and laser processing method | Shinji Koga, Naoto Yoshitaka, Akira Nishiya | 2009-04-14 |
| 7473321 | Laser treatment apparatus | Shinji Koga, Naoto Yoshitaka, Akira Nishiya | 2009-01-06 |
| 7332056 | Thin film removing device and thin film removing method | Shinji Kobayashi | 2008-02-19 |
| 7087118 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more | 2006-08-08 |
| 6936107 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more | 2005-08-30 |
| 6932868 | Coating film forming apparatus | Takahiro Kitano, Toshichika Takei, Yoshiyuki Kawafuchi | 2005-08-23 |
| 6872256 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more | 2005-03-29 |