Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469115 | Substrate processing apparatus, substrate processing method and recording medium | Yuzo Ohishi | 2022-10-11 |
| 11256172 | Light irradiating device, light irradiating method and recording medium | Norihisa Koga, Masaru Tomono | 2022-02-22 |
| 11049739 | Ashing apparatus, ashing method and recording medium | Yuzo Ohishi | 2021-06-29 |
| 10867813 | Substrate processing apparatus, substrate processing method and recording medium | Yuzo Ohishi | 2020-12-15 |
| 10867817 | Substrate processing apparatus, substrate processing method, and storage medium | Yuichi Yoshida, Yuzo Ohishi | 2020-12-15 |
| 10615062 | Substrate processing apparatus, substrate processing method, and storage medium | Yuichi Yoshida, Yuzo Ohishi | 2020-04-07 |