Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11256172 | Light irradiating device, light irradiating method and recording medium | Takaya Kikai, Norihisa Koga | 2022-02-22 |
| 10747121 | Optical processing apparatus and substrate processing apparatus | Teruhiko Moriya, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-08-18 |
| 10558125 | Exposure apparatus, exposure apparatus adjustment method and storage medium | Teruhiko Moriya, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-02-11 |
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Seiji Nagahara, Nobutaka Fukunaga, Gousuke Shiraishi | 2020-01-07 |
| 10274843 | Exposure apparatus, exposure method and storage medium | Seiji Nagahara, Nobutaka Fukunaga, Gousuke Shiraishi, Yukie Minekawa | 2019-04-30 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-10-16 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-07-17 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Yuichi Terashita, Gousuke Shiraishi, Tomohiro Iseki, Hironori Mizoguchi | 2018-02-20 |