Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Masakazu Yarimitsu, Katsuhisa Fujii, Hidejiro RYU | 2025-08-05 |
| 12290898 | Substrate processing method and substrate processing apparatus | Tomohiro Kaneko, Takeshi Matsumoto | 2025-05-06 |
| 12194594 | Substrate processing method and substrate processing apparatus | Takeshi Matsumoto, Tomohiro Kaneko | 2025-01-14 |
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Seiji Nagahara, Masaru Tomono, Gousuke Shiraishi | 2020-01-07 |
| 10274843 | Exposure apparatus, exposure method and storage medium | Seiji Nagahara, Masaru Tomono, Gousuke Shiraishi, Yukie Minekawa | 2019-04-30 |
| 8774491 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded therein | Shinichi Seki, Hiroshi Tomita, Toshifumi Sohara | 2014-07-08 |