Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Nobutaka Fukunaga, Masakazu Yarimitsu, Hidejiro RYU | 2025-08-05 |
| 7947926 | Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method | Tetsuya Oda, Akihiro Kubo | 2011-05-24 |
| 7676296 | Substrate processing system, substrate processing method and computer-readable storage medium storing verification program | Masato Nomura, Shuji Ohno, Toshifumi Sohara | 2010-03-09 |