Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8774491 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded therein | Shinichi Seki, Hiroshi Tomita, Nobutaka Fukunaga | 2014-07-08 |
| 7676296 | Substrate processing system, substrate processing method and computer-readable storage medium storing verification program | Katsuhisa Fujii, Masato Nomura, Shuji Ohno | 2010-03-09 |