Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Nobutaka Fukunaga, Katsuhisa Fujii, Hidejiro RYU | 2025-08-05 |
| 10665478 | Liquid processing apparatus | Nobuhiko Mouri, Shingo Kamitomo, Takeru Hirose, Tomohito Ura | 2020-05-26 |