Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276455 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Shu Yamamoto, Satoshi Okamura | 2025-04-15 |
| 12237177 | Substrate processing apparatus and substrate processing method | Shogo Fukui, Masataka Gosho, Satoshi Okamura | 2025-02-25 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Noritaka Uchida, Takanori Obaru, Hidetaka Shinohara, Shuuichi Nishikido +1 more | 2021-08-10 |
| 10665478 | Liquid processing apparatus | Nobuhiko Mouri, Shingo Kamitomo, Masakazu Yarimitsu, Takeru Hirose | 2020-05-26 |