Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665478 | Liquid processing apparatus | Nobuhiko Mouri, Masakazu Yarimitsu, Takeru Hirose, Tomohito Ura | 2020-05-26 |
| 8882961 | Substrate treatment apparatus | Hironobu Hyakutake, Koji Yamashita | 2014-11-11 |