Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915947 | Substrate processing apparatus and substrate processing method | Takumi Honda, Koji Yamashita, Shinji Tahara | 2024-02-27 |
| 11232959 | Substrate processing apparatus and substrate processing meihod | Takumi Honda, Koji Yamashita, Shinji Tahara | 2022-01-25 |
| 11087992 | Substrate processing method and substrate processing apparatus | Tsukasa Hirayama, Takao Inada, Kazuya Koyama, Hisashi Kawano | 2021-08-10 |
| 11075096 | Substrate processing apparatus | Takao Inada, Hisashi Kawano | 2021-07-27 |
| 10928732 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Takafumi Tsuchiya, Koichiro Kanzaki | 2021-02-23 |
| 10916456 | Substrate liquid processing apparatus and substrate liquid processing method | — | 2021-02-09 |
| 10840081 | Liquid processing apparatus, liquid processing method, and storage medium | Takumi Honda, Kazusige Sano | 2020-11-17 |
| 10458010 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Takafumi Tsuchiya, Koichiro Kanzaki | 2019-10-29 |
| 9027573 | Substrate processing apparatus for maintaining a more uniform temperature during substrate processing | Shinichiro Shimomura | 2015-05-12 |
| 8882961 | Substrate treatment apparatus | Koji Yamashita, Shingo Kamitomo | 2014-11-11 |
| 8778092 | Substrate processing apparatus, substrate processing method and storage medium | Hiroshi Tanaka, Takashi Uno | 2014-07-15 |
| 8685169 | Substrate processing apparatus, substrate processing method and storage medium | Toshihide Takashima | 2014-04-01 |
| 8577502 | Liquid processing apparatus, liquid processing method, computer program, and storage medium | Hiroshi Tanaka, Yuji Kamikawa | 2013-11-05 |
| 6293288 | Cleaning method and apparatus | Naoki Shindo, Shigenori Kitahara | 2001-09-25 |
| 6203627 | Cleaning method | Naoki Shindo, Shigenori Kitahara | 2001-03-20 |