Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381233 | Method and apparatus for substrate processing | Koji Kagawa, Syuhei Yonezawa, Kazuya Dobashi, Masaru Amai | 2019-08-13 |
| 8685169 | Substrate processing apparatus, substrate processing method and storage medium | Hironobu Hyakutake | 2014-04-01 |