Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203021 | Substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2025-01-21 |
| 12020943 | Substrate processing method and substrate processing apparatus | Atsushi Yamashita | 2024-06-25 |
| 11875991 | Substrate treatment method and substrate treatment device | — | 2024-01-16 |
| 11626294 | Substrate processing method, substrate processing apparatus and recording medium | Takumi Honda | 2023-04-11 |
| 11551941 | Substrate cleaning method | Meitoku Aibara | 2023-01-10 |
| 11551931 | Substrate processing apparatus, substrate processing method, and storage medium storing program for executing substrate processing method | Takayuki Toshima | 2023-01-10 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2022-04-19 |
| 11049723 | Substrate processing method and substrate processing apparatus | Koukichi Hiroshiro, Rintaro Higuchi, Kenji Sekiguchi | 2021-06-29 |
| 10985026 | Substrate processing method, substrate processing apparatus, and substrate processing system | — | 2021-04-20 |
| 10381233 | Method and apparatus for substrate processing | Syuhei Yonezawa, Kazuya Dobashi, Toshihide Takashima, Masaru Amai | 2019-08-13 |
| 10121646 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Meitoku Aibara, Yuki Yoshida | 2018-11-06 |
| 9870914 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Meitoku Aibara, Yuki Yoshida | 2018-01-16 |